검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Determination of Young's modulus and Poisson's ratio of thin films by X-Ray Methods (vol 544C, pg 201, 2015) Fu WE, Chang YQ, He BC, Wu CL Thin Solid Films, 593, 198, 2015 |
| 2 |
Nano-scratch evaluations of copper chemical mechanical polishing Fu WE, Chen CCA, Huang KW, Chang YQ, Lin TY, Chang CS, Chen JS Thin Solid Films, 529, 306, 2013 |
| 3 |
Mechanical properties of ultra-thin HfO2 films studied by nano scratches tests Fu WE, Chang YQ, Chang CW, Yao CK, Liao JD Thin Solid Films, 529, 402, 2013 |
| 4 |
Determination of Young's modulus and Poisson's ratio of thin films by X-ray methods Fu WE, Chang YQ, He BC, Wu CL Thin Solid Films, 544, 201, 2013 |
| 5 |
Surface mechanical property assessment of ultra-thin HfO2 films Fu WE, He BC, Chang YQ Thin Solid Films, 544, 212, 2013 |
| 6 |
Reliability assessment of ultra-thin HfO2 films deposited on silicon wafer Fu WE, Chang CW, Chang YQ, Yao CK, Liao JD Applied Surface Science, 258(22), 8974, 2012 |
| 7 |
Layer structure variations of ultra-thin HfO2 films induced by post-deposition annealing Fu WE, Chang YQ Applied Surface Science, 257(17), 7436, 2011 |
| 8 |
Passivation layer effect on surface integrity induced by Cu-CMP Fu WE, Chen CCA, Lin YD, Chang YQ, Huang YH Thin Solid Films, 519(15), 4874, 2011 |
| 9 |
Surface qualities after chemical-mechanical polishing on thin films Fu WE, Lin TY, Chen MK, Chen CCA Thin Solid Films, 517(17), 4909, 2009 |
| 10 |
Small angle X-ray scattering measurements of spatial dependent linewidth in dense nanoline gratings Wang CQ, Fu WE, Li B, Huang H, Soles C, Lin EK, Wu WL, Ho PS, Cresswell MW Thin Solid Films, 517(20), 5844, 2009 |