검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Performance of sub-atmospheric pressure hydride gas source and delivery system for MOCVD Raynor MW, Houlding VH, Frye R, Griffing S, Clark A, Walterson B Journal of Crystal Growth, 261(2-3), 241, 2004 |
| 2 |
Safety benefits of using a sub-atmospheric pressure hydride gas source for MOCVD Raynor MW, Houlding VH, Frye R, Olander K Journal of Crystal Growth, 272(1-4), 822, 2004 |
| 3 |
Sub-atmospheric pressure gas sources for bulk storage and delivery of arsine and phosphine to MOCVD tools Raynor MW, Houlding VH, Funke HH, Frye R, Dietz JA Journal of Crystal Growth, 248, 77, 2003 |