검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Technological solution for the automatic replacement of the catalytic filaments in HWCVD Nos O, Frigeri PA, Bertomeu J Thin Solid Films, 575, 30, 2015 |
| 2 |
Degradation of thin tungsten filaments at high temperature in HWCVD Frigeri PA, Nos O, Bertomeu J Thin Solid Films, 575, 34, 2015 |
| 3 |
Real-time monitoring of the silicidation process of tungsten filaments at high temperature used as catalysers for silane decomposition Nos O, Frigeri PA, Bertomeu J Materials Chemistry and Physics, 143(2), 881, 2014 |
| 4 |
Hot wire configuration for depositing device grade nano-crystalline silicon at high deposition rate Nos O, Frigeri PA, Bertomeu J Thin Solid Films, 519(14), 4531, 2011 |
| 5 |
Hot wire chemical vapor deposition: limits and opportunities of protecting the tungsten catalyzer from silicide with a cavity Frigeri PA, Nos O, Bengoechea S, Frevert C, Asensi JM, Bertomeu J Thin Solid Films, 517(12), 3427, 2009 |