검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Growth of Er-Doped Si Films by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition Rogers JL, Varhue WJ, Adams E, Lavoie MA, Frenette RO Journal of Vacuum Science & Technology A, 12(5), 2762, 1994 |
| No. | Article |
|---|---|
| 1 |
Growth of Er-Doped Si Films by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition Rogers JL, Varhue WJ, Adams E, Lavoie MA, Frenette RO Journal of Vacuum Science & Technology A, 12(5), 2762, 1994 |