검색결과 : 1건
No. | Article |
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1 |
Using pulsed direct current power for reactive sputtering of AL(2)O(3) Belkind A, Freillich A, Scholl R Journal of Vacuum Science & Technology A, 17(4), 1934, 1999 |
No. | Article |
---|---|
1 |
Using pulsed direct current power for reactive sputtering of AL(2)O(3) Belkind A, Freillich A, Scholl R Journal of Vacuum Science & Technology A, 17(4), 1934, 1999 |