검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
SiO2 etching with perfluorobutadiene in a dual frequency plasma reactor Fracassi F, d'Agostino R, Fornelli E, Illuzzi F, Shirafuji T Journal of Vacuum Science & Technology A, 21(3), 638, 2003 |
| No. | Article |
|---|---|
| 1 |
SiO2 etching with perfluorobutadiene in a dual frequency plasma reactor Fracassi F, d'Agostino R, Fornelli E, Illuzzi F, Shirafuji T Journal of Vacuum Science & Technology A, 21(3), 638, 2003 |