검색결과 : 1건
No. | Article |
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1 |
Diamond and hard carbon films for microelectromechanical systems (MEMS) - a nanotribological study Forbes IS, Wilson JIB Thin Solid Films, 420-421, 508, 2002 |
No. | Article |
---|---|
1 |
Diamond and hard carbon films for microelectromechanical systems (MEMS) - a nanotribological study Forbes IS, Wilson JIB Thin Solid Films, 420-421, 508, 2002 |