검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effects of wall recombination on the etch rate and plasma composition of an etch reactor Font GI, Boyd ID, Balakrishnan J Journal of Vacuum Science & Technology A, 16(4), 2057, 1998 |
| 2 |
Numerical Study of the Effects of Reactor Geometry on a Chlorine Plasma Helicon Etch Reactor Font GI, Boyd ID Journal of Vacuum Science & Technology A, 15(2), 313, 1997 |