검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors Stolz CJ, Wolfe JE, Mirkarimi PB, Folta JA, Adams JJ, Menor MG, Teslich NE, Soufli R, Menoni CS, Patel D Thin Solid Films, 592, 216, 2015 |
| 2 |
Multilayer coating and test of the optics for two new 10X Microstepper extreme-ultraviolet lithography cameras Montcalm C, Spiller E, Weber FJ, Wedowski M, Folta JA, Gullikson EM Journal of Vacuum Science & Technology B, 19(4), 1219, 2001 |
| 3 |
First lithographic results from the extreme ultraviolet Engineering Test Stand Chapman HN, Ray-Chaudhuri AK, Tichenor DA, Replogle WC, Stulen RH, Kubiak GD, Rockett PD, Klebanoff LE, O'Connell D, Leung AH, Jefferson KL, Wronosky JB, Taylor JS, Hale LC, Blaedel K, Spiller EA, Sommargren GE, Folta JA, Sweeney DW, Gullikson EM, Naulleau P, Goldberg KA, Bokor J, Attwood DT, Mickan U, Hanzen R, Panning E, Yan PY, Gwyn CW, Lee SH Journal of Vacuum Science & Technology B, 19(6), 2389, 2001 |
| 4 |
Low-Temperature Wafer Bonding of Surfaces Using a Reactive Sputtered Oxide Folta JA, Hunt CE, Farrens SN Journal of the Electrochemical Society, 141(8), 2157, 1994 |