검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Effect of deposition temperature on the bonding configurations and properties of fluorine doped silicon oxide film Lu WL, Kuo TW, Huang CH, Wang NF, Tsai YZ, Wang MW, Hung CI, Houng MP Thin Solid Films, 520(1), 35, 2011 |
| 2 |
Deposition damage evaluation of fluorine doped silicon oxide using simple damage monitoring system Kim DH, Kim B, Lee J, Song JT Thin Solid Films, 518(22), 6482, 2010 |
| 3 |
Study on precipitations of fluorine-doped silicon oxide Wu J, Wang YL, Liu CP, Chang SC, Kuo CT, Ay C Thin Solid Films, 447, 599, 2004 |
| 4 |
Structure characterization of carbon and fluorine-doped silicon oxide films with low dielectric constant Ding SJ, Chen L, Wan XG, Wang PF, Zhang JY, Zhang DW, Wang JT Materials Chemistry and Physics, 71(2), 125, 2001 |