검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Problem of catalyst ageing during the hot-wire chemical vapour deposition of thin silicon films Hrunski D, Scheib M, Mertz M, Schroeder B Thin Solid Films, 517(11), 3370, 2009 |
| 2 |
Hot Ta filament resistance in-situ monitoring under silane containing atmosphere Grunsk D, Schroeder B Thin Solid Films, 516(5), 814, 2008 |