검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Silicidation and carburization of the tungsten filament in HWCVD with silacyclobutane precursor gases Shi YJ, Tong L, Eustergerling BD, Li XM Thin Solid Films, 519(14), 4442, 2011 |
| 2 |
Effect of filament temperature and deposition time on the formation of tungsten silicide with silane Sveen CE, Shi YJ Thin Solid Films, 519(14), 4447, 2011 |
| 3 |
Effect of ammonia on Ta filaments in the hot wire CVD process Verlaan V, van der Werf CHM, Oliphant CJ, Bakker R, Houweling ZS, Schropp REI Thin Solid Films, 517(12), 3435, 2009 |