검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reduction of oxide tub isolation stress using a silicon nitride liner Burkhardt JJ, Cox JR, Fertig DJ, Nelson GJ Journal of the Electrochemical Society, 147(9), 3482, 2000 |
| No. | Article |
|---|---|
| 1 |
Reduction of oxide tub isolation stress using a silicon nitride liner Burkhardt JJ, Cox JR, Fertig DJ, Nelson GJ Journal of the Electrochemical Society, 147(9), 3482, 2000 |