검색결과 : 2건
No. | Article |
---|---|
1 |
Reactive-ion etching of high-Q and submicron-diameter GaAs/AlAs micropillar cavities Varoutsis S, Laurent S, Sagnes I, Lemaitre A, Ferlazzo L, Meriadec C, Patriarche G, Robert-Philip I, Abram I Journal of Vacuum Science & Technology B, 23(6), 2499, 2005 |
2 |
Electron beam lithography: resolution limits and applications Vieu C, Carcenac F, Pepin A, Chen Y, Mejias M, Lebib A, Manin-Ferlazzo L, Couraud L, Launois H Applied Surface Science, 164, 111, 2000 |