화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Reactive-ion etching of high-Q and submicron-diameter GaAs/AlAs micropillar cavities
Varoutsis S, Laurent S, Sagnes I, Lemaitre A, Ferlazzo L, Meriadec C, Patriarche G, Robert-Philip I, Abram I
Journal of Vacuum Science & Technology B, 23(6), 2499, 2005
2 Electron beam lithography: resolution limits and applications
Vieu C, Carcenac F, Pepin A, Chen Y, Mejias M, Lebib A, Manin-Ferlazzo L, Couraud L, Launois H
Applied Surface Science, 164, 111, 2000