검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators Lin CM, Chen YY, Felmetsger VV, Senesky DG, Pisano AP Advanced Materials, 24(20), 2722, 2012 |
| 2 |
Microstructure and temperature coefficient of resistance of thin cermet resistor films deposited from CrSi2-Cr-SiC targets by S-gun magnetron Felmetsger VV Journal of Vacuum Science & Technology A, 28(1), 33, 2010 |
| 3 |
Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering Tanner SM, Felmetsger VV Journal of Vacuum Science & Technology A, 28(1), 69, 2010 |
| 4 |
Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films Felmetsger VV, Laptev PN, Tanner SM Journal of Vacuum Science & Technology A, 27(3), 417, 2009 |
| 5 |
High-adhesive back side metallization of ultrathin wafers Felmetsger VV Journal of Vacuum Science & Technology B, 25(3), 881, 2007 |