검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Brittle and ductile fracture mechanics analysis of surface damage caused during CMP Ring TA, Feeney P, Boldridge D, Kasthurirangan J, Li ST, Dirksen JA Journal of the Electrochemical Society, 154(3), H239, 2007 |
| 2 |
Analysis of large particle count in fumed silica slurries and its correlation with scratch defects generated by CMP Remsen EE, Anjur S, Boldridge D, Kamiti M, Li ST, Johns T, Dowell C, Kasthurirangan J, Feeney P Journal of the Electrochemical Society, 153(5), G453, 2006 |