검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure Karwal S, Verheijen MA, Arts K, Faraz T, Kessels WMM, Creatore M Plasma Chemistry and Plasma Processing, 40(3), 697, 2020 |