검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma source for ion and electron beam lithography Lee Y, Gough RA, Leung KN, Vujic J, Williams MD, Zahir N, Fallman W, Tockler M, Bruenger W Journal of Vacuum Science & Technology B, 16(6), 3367, 1998 |
| No. | Article |
|---|---|
| 1 |
Plasma source for ion and electron beam lithography Lee Y, Gough RA, Leung KN, Vujic J, Williams MD, Zahir N, Fallman W, Tockler M, Bruenger W Journal of Vacuum Science & Technology B, 16(6), 3367, 1998 |