검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Energy flux to the substrate in a magnetron discharge with hollow cathode Poluektov NP, Tsar'gorodsev YP, Usatov II, Evstigneev AG Thin Solid Films, 640, 60, 2017 |
| No. | Article |
|---|---|
| 1 |
Energy flux to the substrate in a magnetron discharge with hollow cathode Poluektov NP, Tsar'gorodsev YP, Usatov II, Evstigneev AG Thin Solid Films, 640, 60, 2017 |