검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Dynamic alignment control for fluid-immersion lithographies using interferometric-spatial-phase imaging Moon EE, Mondol MK, Everett PN, Smith HI Journal of Vacuum Science & Technology B, 23(6), 2607, 2005 |
| 2 |
Nanometer gap measurement and verification via the chirped-Talbot effect Moon EE, Chen L, Everett PN, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 22(6), 3378, 2004 |
| 3 |
Interferometric-spatial-phase imaging for six-axis mask control Moon EE, Chen L, Everett PN, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 21(6), 3112, 2003 |
| 4 |
Sub-100 nm metrology using interferometrically produced fiducials Schattenburg ML, Chen C, Everett PN, Ferrera J, Konkola P, Smith HI Journal of Vacuum Science & Technology B, 17(6), 2692, 1999 |
| 5 |
Novel mask-wafer gap measurement scheme with nanometer-level detectivity Moon EE, Everett PN, Meinhold MW, Mondol MK, Smith HI Journal of Vacuum Science & Technology B, 17(6), 2698, 1999 |
| 6 |
Application of interferometric broadband imaging alignment on an experimental x-ray stepper Moon EE, Lee J, Everett PN, Smith HI Journal of Vacuum Science & Technology B, 16(6), 3631, 1998 |
| 7 |
Simultaneous Measurement of Gap and Superposition in a Precision Aligner for X-Ray Nanolithography Moon EE, Everett PN, Rhee K, Smith HI Journal of Vacuum Science & Technology B, 14(6), 3969, 1996 |
| 8 |
Immunity to Signal Degradation by Overlayers Using a Novel Spatial-Phase-Matching Alignment System Moon EE, Everett PN, Smith HI Journal of Vacuum Science & Technology B, 13(6), 2648, 1995 |