검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Photomask image enhancement using grating-generated surface waves Lafferty NV, Bourov A, Estroff A, Smith BW Journal of Vacuum Science & Technology B, 26(6), 2192, 2008 |
| 2 |
Hyper NA water immersion lithography at 193 nm and 248 nm Smith BW, Fan YF, Zhou JM, Bourov A, Zavyalova L, Lafferty N, Cropanese F, Estroff A Journal of Vacuum Science & Technology B, 22(6), 3439, 2004 |