검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Corrosion and inhibition of WNXCY barrier during chemical mechanical planarization Ernur D, Terzieva V, Schuhmacher J, Sutcliffe V, Whelan CM, Maex K Journal of the Electrochemical Society, 152(12), B512, 2005 |
| 2 |
Corrosion of narrow copper damascene interconnects Ernur D, Terzieva V, Wu W, Brongersma SH, Maex K Journal of the Electrochemical Society, 151(12), B636, 2004 |