화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Interdiffusion studies of single crystal TiN/NbN superlattice thin films
Engstrom C, Birch J, Hultman L, Lavoie C, Cabral C, Jordan-Sweet JL, Carlsson JRA
Journal of Vacuum Science & Technology A, 17(5), 2920, 1999
2 Nanoindentation hardness, abrasive wear, and microstructure of TiN/NbN polycrystalline nanostructured multilayer films grown by reactive magnetron sputtering
Ljungcrantz H, Engstrom C, Hultman L, Olsson M, Chu X, Wong MS, Sproul WD
Journal of Vacuum Science & Technology A, 16(5), 3104, 1998