검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide Barako MT, English TS, Roy-Panzer S, Kenny TW, Goodson KE Thin Solid Films, 649, 24, 2018 |
| No. | Article |
|---|---|
| 1 |
Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide Barako MT, English TS, Roy-Panzer S, Kenny TW, Goodson KE Thin Solid Films, 649, 24, 2018 |