검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Experimental and computer simulation studies of the "baffled target" reactive sputtering process Engelmark F, Westlinder J, Nyberg T, Berg S Journal of Vacuum Science & Technology A, 21(6), 1981, 2003 |
| 2 |
Selective etching of AI/AIN structures for metallization of surface acoustic wave devices Engelmark F, Iriarte GF, Katardjiev IV Journal of Vacuum Science & Technology B, 20(3), 843, 2002 |
| 3 |
Simulation and dielectric characterization of reactive dc magnetron cosputtered (Ta2O5)(1-x)(TiO2)(x) thin films Westlinder J, Zhang Y, Engelmark F, Possnert G, Blom HO, Olsson J, Berg S Journal of Vacuum Science & Technology B, 20(3), 855, 2002 |
| 4 |
Li conduction in sputtered amorphous Ta2O5 Frenning G, Engelmark F, Niklasson GA, Stromme M Journal of the Electrochemical Society, 148(5), A418, 2001 |
| 5 |
Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition Engelmark F, Iriarte GF, Katardjiev IV, Ottosson M, Muralt P, Berg S Journal of Vacuum Science & Technology A, 19(5), 2664, 2001 |
| 6 |
Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition Engelmark F, Fucntes G, Katardjiev IV, Harsta A, Smith U, Berg S Journal of Vacuum Science & Technology A, 18(4), 1609, 2000 |
| 7 |
Patterning of tantalum pentoxide, a high epsilon material, by inductively coupled plasma etching Jonsson LB, Westlinder J, Engelmark F, Hedlund C, Du J, Smith U, Blom HO Journal of Vacuum Science & Technology B, 18(4), 1906, 2000 |