검색결과 : 1건
No. | Article |
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1 |
Negative Ion-Containing Plasma in Parallel-Plate Radiofrequency Discharge in Oxygen Amemiya H, Yasuda N, Endou M Plasma Chemistry and Plasma Processing, 14(3), 209, 1994 |
No. | Article |
---|---|
1 |
Negative Ion-Containing Plasma in Parallel-Plate Radiofrequency Discharge in Oxygen Amemiya H, Yasuda N, Endou M Plasma Chemistry and Plasma Processing, 14(3), 209, 1994 |