검색결과 : 1건
No. | Article |
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1 |
Kinetics and Mechanism of Plasma Oxidation of Tantalum Silicides Gomezsanroman R, Perezcasero R, Perriere J, Enard JP, Martinezduart JM Journal of Vacuum Science & Technology A, 13(1), 54, 1995 |
No. | Article |
---|---|
1 |
Kinetics and Mechanism of Plasma Oxidation of Tantalum Silicides Gomezsanroman R, Perezcasero R, Perriere J, Enard JP, Martinezduart JM Journal of Vacuum Science & Technology A, 13(1), 54, 1995 |