검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Real-Time Feedback for Sidewall Profile Control in Reactive Ion Etching Rashap B, Freudenberg J, Elta M Journal of Vacuum Science & Technology A, 13(3), 1792, 1995 |
| 2 |
In-Situ Diagnostic for Etch Uniformity Buie MJ, Pender JT, Soniker J, Brake ML, Elta M Journal of Vacuum Science & Technology A, 13(4), 1930, 1995 |