화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Properties of Si1-x-yGexCy epitaxial films grown by ultrahigh vacuum chemical vapor deposition
John S, Quinones EJ, Ferguson B, Ray SK, Anantharam B, Middlebrooks S, Mullins CB, Ekerdt J, Rawlings J, Banerjee SK
Journal of the Electrochemical Society, 146(12), 4611, 1999
2 Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography
Ruchhoeft P, Colburn M, Choi B, Nounu H, Johnson S, Bailey T, Damle S, Stewart M, Ekerdt J, Sreenivasan SV, Wolfe JC, Willson CG
Journal of Vacuum Science & Technology B, 17(6), 2965, 1999