검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low-Temperature Chemically Assisted Ion-Beam Etching Processes Using Cl-2, CH3I, and Ibr3 to Etch InP Optoelectronic Devices Eisele KM, Daleiden J, Ralston J Journal of Vacuum Science & Technology B, 14(3), 1780, 1996 |
| No. | Article |
|---|---|
| 1 |
Low-Temperature Chemically Assisted Ion-Beam Etching Processes Using Cl-2, CH3I, and Ibr3 to Etch InP Optoelectronic Devices Eisele KM, Daleiden J, Ralston J Journal of Vacuum Science & Technology B, 14(3), 1780, 1996 |