검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Investigation of epitaxial process-induced stacking faults on silicon wafers by surface analytical methods Patsch B, Ehlert A, Lankmayr E Journal of the Electrochemical Society, 155(7), H540, 2008 |
| 2 |
Characterization of crystal quality by crystal originated particle delineation and the impact on the silicon wafer surface Graf D, Suhren M, Lambert U, Schmolke R, Ehlert A, von Ammon W, Wagner P Journal of the Electrochemical Society, 145(1), 275, 1998 |
| 3 |
Improvement of Czochralski Silicon-Wafers by High-Temperature Annealing Graf D, Lambert U, Brohl M, Ehlert A, Wahlich R, Wagner P Journal of the Electrochemical Society, 142(9), 3189, 1995 |