검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Egorov KV, Lebedinskii YY, Soloviev AA, Chouprik AA, Azarov AY, Markeev AM Applied Surface Science, 419, 107, 2017 |
| 2 |
Full ALD Ta2O5-based stacks for resistive random access memory grown with in vacuo XPS monitoring Egorov KV, Lebedinskii YY, Markeev AM, Orlov OM Applied Surface Science, 356, 454, 2015 |
| 3 |
Resistive switching effect in HfxAl1-xOy with a graded Al depth profile studied by hard X-ray photoelectron spectroscopy Matveyev YA, Markeev AM, Lebedinskii YY, Chouprik AA, Egorov KV, Drube W, Zenkevich AV Thin Solid Films, 563, 20, 2014 |