검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Selective Chemical Vapor Deposition-Grown Ru for Cu Interconnect Capping Applications Yang CC, McFeely FR, Wang PC, Chanda K, Edelstein DC Electrochemical and Solid State Letters, 13(5), D33, 2010 |
| No. | Article |
|---|---|
| 1 |
Selective Chemical Vapor Deposition-Grown Ru for Cu Interconnect Capping Applications Yang CC, McFeely FR, Wang PC, Chanda K, Edelstein DC Electrochemical and Solid State Letters, 13(5), D33, 2010 |