검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Study of pattern density effects in CMP using fixed abrasive pads Gorantla VR, Venigalla R, Economikos L, O'Connor DR, Babu SV Journal of the Electrochemical Society, 150(12), G821, 2003 |
| 2 |
Characterization of bis(tertiary-butylamino)silane-based low-pressure chemical vapor deposition silicate glass films Park B, Conti R, Economikos L, Chakravarti A, Ellenberger J Journal of Vacuum Science & Technology B, 19(5), 1788, 2001 |
| 3 |
Laser System for Fine-Pitch Tape Automated Bonding Economikos L Journal of Vacuum Science & Technology B, 12(4), 2394, 1994 |