검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Investigation of MOS capacitors and SOI-MOSFETs with epitaxial gadolinium oxide (Gd2O3) and titanium nitride (TiN) electrodes Echtermeyer T, Gottlob HDB, Wahlbrink T, Mollenhauer T, Schmidt M, Efavi JK, Lemme MC, Kurz H Solid-State Electronics, 51(4), 617, 2007 |
| 2 |
Scalable gate first process for silicon on insulator metal oxide semiconductor field effect transistors with epitaxial high-k dielectrics Gottlob HDB, Mollenhauer T, Wahlbrink T, Schmidt M, Echtermeyer T, Efavi JK, Lemme MC, Kurz H Journal of Vacuum Science & Technology B, 24(2), 710, 2006 |
| 3 |
CMOS integration of epitaxial Gd2O3 high-k gate dielectrics Gottlob HDB, Echtermeyer T, Mollenhauer T, Efavi JK, Schmidt M, Wahlbrink T, Lemme MC, Kurz H, Czernohorsky M, Bugiel E, Osten HJ, Fissel A Solid-State Electronics, 50(6), 979, 2006 |