검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of annealing on X-ray-amorphous CVD W-Si-N barrier layer materials Gokce OH, Amin S, Ravindra NM, Szostak DJ, Paff RJ, Fleming JG, Galewski CJ, Shallenberger J, Eby R Thin Solid Films, 353(1-2), 149, 1999 |
| No. | Article |
|---|---|
| 1 |
Effects of annealing on X-ray-amorphous CVD W-Si-N barrier layer materials Gokce OH, Amin S, Ravindra NM, Szostak DJ, Paff RJ, Fleming JG, Galewski CJ, Shallenberger J, Eby R Thin Solid Films, 353(1-2), 149, 1999 |