검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Modeling of precursor coverage in ion-beam induced etching and verification with experiments using XeF2 on SiO2 Ebm C, Hobler G, Waid S, Wanzenboeck HD Journal of Vacuum Science & Technology B, 28(5), 946, 2010 |
| 2 |
Argon ion multibeam nanopatterning of Ni-Cu inserts for injection molding Koeck A, Bruck R, Wellenzohn M, Hainberger R, Platzgummer E, Loeschner H, Joechl P, Eder-Kapl S, Ebm C, Czepl P, Kaiblinger K, Pipelka F, Letzkus F, Irmscher M, Heitkamp B Journal of Vacuum Science & Technology B, 28(6), C6B1, 2010 |
| 3 |
Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition Ebm C, Platzgummer E, Loeschner H, Eder-Kapl S, Joechl P, Kuemmel M, Reitinger R, Hobler G, Koeck A, Hainberger R, Wellenzohn M, Letzkus F, Irmscher M Journal of Vacuum Science & Technology B, 27(6), 2668, 2009 |