검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Polythiophene-based charge dissipation layer for electron beam lithography of zinc oxide and gallium nitride Dylewicz R, Lis S, De La Rue RM, Rahman F Journal of Vacuum Science & Technology B, 28(4), 817, 2010 |
| 2 |
Fabrication of submicron-sized features in InP/InGaAsP/AlGaInAs quantum well heterostructures by optimized inductively coupled plasma etching with Cl-2/Ar/N-2 chemistry Dylewicz R, De La Rue RM, Wasielewski R, Mazur P, Mezosi G, Bryce AC Journal of Vacuum Science & Technology B, 28(4), 882, 2010 |