검색결과 : 1건
No. | Article |
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1 |
Analysis of large particle count in fumed silica slurries and its correlation with scratch defects generated by CMP Remsen EE, Anjur S, Boldridge D, Kamiti M, Li ST, Johns T, Dowell C, Kasthurirangan J, Feeney P Journal of the Electrochemical Society, 153(5), G453, 2006 |