검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Trench etch processes for dual damascene patterning of low-k dielectrics Jiang P, Celii FG, Dostalik WW, Newton KJ, Sakima H Journal of Vacuum Science & Technology A, 19(4), 1388, 2001 |
| 2 |
Analysis of injection current through thin gate oxide during metal etch Kinoshita T, Krishnan S, Dostalik WW, McVittie JP Journal of Vacuum Science & Technology B, 19(2), 403, 2001 |
| 3 |
Surface Nitridation of Silicon Dioxide with a High-Density Nitrogen Plasma Kraft R, Schneider TP, Dostalik WW, Hattangady S Journal of Vacuum Science & Technology B, 15(4), 967, 1997 |