화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Numerical investigation of turbomolecular pumps using the direct simulation Monte Carlo method with moving surfaces
Versluis R, Dorsman R, Thielen L, Roos ME
Journal of Vacuum Science & Technology A, 27(3), 543, 2009
2 Multi-scale modeling of chemical vapor deposition processes for thin film technology
Kleijn CR, Dorsman R, Kuijlaars KJ, Okkerse M, van Santen H
Journal of Crystal Growth, 303(1), 362, 2007
3 Zinc deposition experiments for. validation of direct-simulation Monte Carlo calculations of rarefied internal gas flows
Dorsman R, Kleijn CR, Velthuis JFM, Zijp JP, van Mol AMB
Journal of Vacuum Science & Technology A, 25(3), 474, 2007
4 Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110)
Tiggelaar RM, Berenschot JW, Elwenspoek MC, Gardeniers JGE, Dorsman R, Kleijn CR
Journal of Vacuum Science & Technology B, 25(4), 1207, 2007
5 The effect of HVPE reactor geometry on GaN growth rate - experiments versus simulations
Dam CEC, Grzegorczyk AP, Hageman PR, Dorsman R, Kleijn CR, Larsen PK
Journal of Crystal Growth, 271(1-2), 192, 2004