검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Diagnostics by optical absorption of sputtered atom density in magnetron discharges Dony MF, Dauchot JP, Wautelet M, Hecq M, Ricard A Journal of Vacuum Science & Technology A, 18(3), 809, 2000 |
| 2 |
Comparison of Direct-Current and Radio-Frequency Argon Magnetron Discharges by Optical-Emission and Absorption-Spectroscopy Dony MF, Ricard A, Wautelet M, Dauchot JP, Hecq M Journal of Vacuum Science & Technology A, 15(4), 1890, 1997 |