검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Generalized ellipsometry of artificially designed line width roughness Foldyna M, Germer TA, Bergner BC, Dixson RG Thin Solid Films, 519(9), 2633, 2011 |
| 2 |
Traceable calibration of critical-dimension atomic force microscope linewidth measurements with nanometer uncertainty Dixson RG, Allen RA, Guthrie WF, Cresswell MW Journal of Vacuum Science & Technology B, 23(6), 3028, 2005 |