검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Damage to Si Substrates During SiO2 Etching - A Comparison of Reactive Ion Etching and Magnetron-Enhanced Reactive Ion Etching Gu T, Ditizio RA, Fonash SJ, Awadelkarim OO, Ruzyllo J, Collins RW, Leary HJ Journal of Vacuum Science & Technology B, 12(2), 567, 1994 |