검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
SiO2 to Si Selectivity Mechanisms in High-Density Fluorocarbon Plasma-Etching Kirmse KH, Wendt AE, Disch SB, Wu JZ, Abraham IC, Meyer JA, Breun RA, Woods RC Journal of Vacuum Science & Technology B, 14(2), 710, 1996 |
| No. | Article |
|---|---|
| 1 |
SiO2 to Si Selectivity Mechanisms in High-Density Fluorocarbon Plasma-Etching Kirmse KH, Wendt AE, Disch SB, Wu JZ, Abraham IC, Meyer JA, Breun RA, Woods RC Journal of Vacuum Science & Technology B, 14(2), 710, 1996 |