검색결과 : 1건
No. | Article |
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1 |
Nondestructive three-dimensional observation of defects in semi-insulating 6H-SiC single-crystal wafers using a scanning laser microscope (SLM) and infrared light-scattering tomography (IR-LST) Wutimakun P, Buteprongjit C, Morimoto J Journal of Crystal Growth, 311(14), 3781, 2009 |