검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of Si wafer thinning processes on (sub)surface defects Inoue F, Jourdain A, Peng L, Phommahaxay A, De Vos J, Rebibis KJ, Miller A, Sleeckx E, Beyne E, Uedono A Applied Surface Science, 404, 82, 2017 |
| No. | Article |
|---|---|
| 1 |
Influence of Si wafer thinning processes on (sub)surface defects Inoue F, Jourdain A, Peng L, Phommahaxay A, De Vos J, Rebibis KJ, Miller A, Sleeckx E, Beyne E, Uedono A Applied Surface Science, 404, 82, 2017 |