검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Instantaneous cleaning of silicon substrates by mesoplasma for high-rate and low-temperature epitaxy Diaz JMA, Harima K, Kambara M, Yoshida T Thin Solid Films, 518(3), 976, 2009 |
| No. | Article |
|---|---|
| 1 |
Instantaneous cleaning of silicon substrates by mesoplasma for high-rate and low-temperature epitaxy Diaz JMA, Harima K, Kambara M, Yoshida T Thin Solid Films, 518(3), 976, 2009 |