검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
End-pointing chamber clean by calorimetric probing of process effluent Chen IS, Neuner JW, Welch JJ, Chen PSH, DiMeo F Journal of Vacuum Science & Technology A, 24(4), 1308, 2006 |
| 2 |
In situ conductivity characterization of oxide thin film growth phenomena on microhotplates DiMeo F, Cavicchi RE, Semancik S, Suehle JS, Tea NH, Small J, Armstrong JT, Kelliher JT Journal of Vacuum Science & Technology A, 16(1), 131, 1998 |