검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Three-dimensional micro- and nanostructuring by combination of nanoimprint and x-ray lithography Tormen M, Romanato F, Altissimo M, Businaro L, Candeloro P, Di Fabrizio EM Journal of Vacuum Science & Technology B, 22(2), 766, 2004 |